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Johan Hendrik Klootwijk
Johan Hendrik Klootwijk
Decoupling capacitor
Atomic layer deposition
Electronic engineering
Trench
Materials science
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Ultrahigh-density trench decoupling capacitors comprising multiple MIM layer stacks grown by atomic layer deposition
2008
Fred Roozeboom
Wouter Dekkers
K.B. Jinesh
Johan Hendrik Klootwijk
Marcel A. Verheijen
H.-D. Kim
D. Blin
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