Old Web
English
Sign In
Acemap
>
authorDetail
>
Noriyuki Kodama
Noriyuki Kodama
Lateral diffusion
Etching
Analytical chemistry
Electron energy loss spectroscopy
Dopant
3
Papers
3
Citations
0
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (3)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
Simplified monitoring technique for line-short defects that provides high sensitivity and high throughput : Technologies supporting semiconductor scientific manufacturing : Process monitoring, testing, failure analysis and reliability
2000
Nec Research & Development
Hiroaki Kikuchi
Noriyuki Kodama
Naoharu Nishio
Noriaki Oda
Show All
Source
Cite
Save
Citations (0)
Lateral Diffusion Distance Measurement of 40?80 nm Junctions by Etching/TEM-Electron Energy Loss Spectroscopy Method
1999
Japanese Journal of Applied Physics
Yorinobu Kunimune
Naoharu Nishio
Noriyuki Kodama
Hiroaki Kikuchi
Takeshi Toda
Akira Mineji
Seiichi Shishiguchi
S. Saito
Show All
Source
Cite
Save
Citations (3)
Lateral Diffusion Distance Measurement for 40-80 nm Junctions by Etching/TEM-EELS Method
1998
The Japan Society of Applied Physics
Yorinobu Kunimune
Naoharu Nishio
Noriyuki Kodama
Hiroaki Kikuchi
Takeshi Toda
Akira Mineji
Seiichi Shishiguchi
S. Saito
Show All
Source
Cite
Save
Citations (0)
1