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Benjamin T. Spike
Benjamin T. Spike
University of Wisconsin-Madison
Contact angle
Free surface
Immersion lithography
Refractive index
Flow velocity
2
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3
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Modeling and experimental investigation of bubble entrainment for flow over topography during immersion lithography
2004
Holly B. Burnett
Alexander C. Wei
Mohamed El Morsi
Timothy A. Shedd
Gregory Nellis
Benjamin T. Spike
Chris K. Van Peski
Andrew Grenville
Roxann L. Engelstad
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Citations (3)
Modeling and experimental investigation of bubble entrainment for flow over topography during immersion lithography
2004
Holly B. Burnett
Alex C. Wei
Mohamed El Morsi
Timothy A. Shedd
Gregory Nellis
Benjamin T. Spike
Chris K. Van Peski
Andrew Grenville
Roxann L. Engelstad
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