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Hsin-Chieh Yao
Hsin-Chieh Yao
TSMC
Electronic engineering
Materials science
Time-dependent gate oxide breakdown
Interconnection
RC time constant
2
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2
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Advanced patterning approaches for Cu/Low-k interconnects
2017
IITC | International Interconnect Technology Conference
Cheng-Hsiung Tsai
Chung-Ju Lee
C. H. Huang
Jay Wu
H. W. Tien
Hsin-Chieh Yao
Y.C. Wang
Shau-Lin Shue
Min Cao
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A novel LWR reduction approach to enhance reliability performance in ultra-thin barrier/porous low-k (K<2.4) interconnect
2012
IITC | International Interconnect Technology Conference
C. W. Lu
T. J. Tsai
Y. S. Chang
Cheng-Hsiung Tsai
Sunil Kumar Singh
T. M. Huang
Hsin-Chieh Yao
Chung-Ju Lee
Tien-I Bao
Shau-Lin Shue
Chen-Hua Yu
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