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Makoto Okada
Makoto Okada
Sumitomo Heavy Industries
Excimer laser
Laser power scaling
Electric power
Laser
Pulsed power
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Development of over 300 watts average power excimer laser
2004
Proceedings of SPIE
K. Hirata
Joichi Kawamura
Hiroyuki Katou
Kazuaki Sajiki
Makoto Okada
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