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Andy Brendler
Andy Brendler
GlobalFoundries
Optics
Extreme ultraviolet
Surface finish
Stochastic optimization
Photoresist
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Optimization of stochastic EUV resist models parameters to mitigate line edge roughness
2017
Proceedings of SPIE
John J. Biafore
Azat Latypov
Anindarupa Chunder
Andy Brendler
Harry J. Levinson
Todd Bailey
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