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Aimin Xing
Aimin Xing
IBM
Mole
CMOS
Analytical chemistry
Tungsten
Nucleation
1
Papers
14
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Low resistivity tungsten for 32nm node MOL contacts and beyond
2012
Microelectronic Engineering
Filippos Papadatos
Keith Kwong Hon Wong
Valli Arunachalam
Chung Hwan Shin
Zhengwen Li
Michael P. Chudzik
Woo-Hyeong Lee
Aimin Xing
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Citations (14)
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