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Seung-Woog Lee
Seung-Woog Lee
Reactive-ion etching
Photolithography
Bilayer
Resist
Surface finish
1
Papers
2
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Improvement of resist profile roughness in bilayer resist process
2000
Chang-Young Jeong
Sang Wook Ryu
Ki Yeop Park
Won Gyu Lee
Seung-Woog Lee
Dai-Hoon Lee
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Citations (2)
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