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E. A. Zambotti
E. A. Zambotti
State University of Campinas
Materials science
Thermal stability
Raman spectroscopy
Sputter deposition
Sheet resistance
2
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1
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0
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Raman study of Nickel-Platinum Silicide formed by RTP process
2013
SBMicro | Symposium on Microelectronics Technology and Devices
F. H. Cioldin
M. V. P. dos Santos
I. Doi
J. A. Diniz
A. Flacker
M. Rautember
O. Teschke
Luiz Orivaldo Bonugli
E. A. Zambotti
Jose Godoy Filho
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Citations (1)
Investigation of Thermal Stability of Titanium Nitride Using A RTA Process
2012
F. H. Cioldin
Lucas Petersen Barbosa Lima
I. Doi
J. A. Diniz
J. Godoy Filho
E. A. Zambotti
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