Old Web
English
Sign In
Acemap
>
authorDetail
>
Pan Yang
Pan Yang
Lam Research
Scaling
Materials science
Ion
low energy
short exposure
2
Papers
1
Citations
0
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (1)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
Universal scaling relationship for atomic layer etching
2021
Journal of Vacuum Science and Technology
Keren J. Kanarik
Samantha Tan
Wenbing Yang
Ivan L. Berry
Pan Yang
Richard A. Gottscho
Show All
Source
Cite
Save
Citations (1)
1