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Shenghao Han
Shenghao Han
Sputter deposition
Substrate (chemistry)
Doping
Materials science
Inorganic chemistry
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磁控溅射过程中衬底温度对MZO薄膜特性的影响Effects of Substrate Temperature on the Properties of Mo-doped ZnO Films Prepared by RF Magnetron Sputtering
2009
Shenghao Han
Xiuxian Wu
Wenjing Zhao
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