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Yi-Cyuan Lin
Yi-Cyuan Lin
Nitrogen
Chemical vapor deposition
Glow discharge
Engineering
Silicon oxide
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Impact on the Gas Barrier Property of Silicon Oxide Films Prepared by Tetramethylsilane-Based PECVD Incorporating with Ammonia
2017
Applied Sciences
Hua-Wen Liu
Tai-Hong Chen
Chun-Hao Chang
Shao-Kai Lu
Yi-Cyuan Lin
Day-Shan Liu
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