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V. Chavva
V. Chavva
Ion implantation
High-κ dielectric
Metal gate
Silicon on insulator
Optoelectronics
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High-k metal-gate PMOS FinFET threshold voltage tuning with aluminum implantation
2012
K. V. Rao
T. Ngai
C. Hobbs
M. Rodgers
S. Vivekanand
V. Chavva
Fareen Adeni Khaja
Todd Henry
K. H. Shim
P. D. Kirsch
R. Jammy
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