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Extending the Life of TTL-Alignment Steppers to 65-nm Technology ISSM Paper: PO-P-160
2007
Nabil Yazdani
Eric M. Apelgren
Richard D. Edwards
Michelle A. Simmons
Stuart Brown
Spansion Llc
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Process Integration for Robust Contact 1 Module of High Density Floating Gate Memory Device ISSM Paper: PE-O-231
2007
International Symposium on Semiconductor Manufacturing
Shengnian Song
Joseph Wiseman
Nabil Yazdani
Christopher M. Foster
Stuart Brown
Spansion Llc
Amol Joshi
Hiro Kinoshita
Kuo-Tung Chang
Calvin Gabriel
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