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Chikara Ichihara
Chikara Ichihara
Kobe Steel
Rutherford backscattering spectrometry
Analytical chemistry
Chemistry
Resolution (mass spectrometry)
Acceptance angle
3
Papers
4
Citations
0
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2024
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High-resolution Rutherford backscattering spectrometry study on process dependent elemental depth profile change of hafnium silicate on silicon
2009
Journal of Vacuum Science and Technology
Chikara Ichihara
Satoshi Yasuno
H. Takeuchi
Akira Kobayashi
S. Mure
Kazuhisa Fujikawa
K Sasakawa
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Theoretical analysis of mass and depth resolutions of cyclotron Rutherford backscattering spectrometry system
2009
Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms
Chikara Ichihara
Akira Kobayashi
Ken-ichi Inoue
Kenji Kimura
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Characterization of interface of Al-Ni/a-Si for thin film transistor using high-resolution Rutherford backscattering spectrometry.
2009
Micron
Chikara Ichihara
Nobuyuki Kawakami
Satoshi Yasuno
Aya Hino
Kazuhisa Fujikawa
Akira Kobayashi
Mototaka Ochi
Hiroshi Gotoh
Toshihiro Kugimiya
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