Old Web
English
Sign In
Acemap
>
authorDetail
>
D. Loraine
D. Loraine
Analytical chemistry
Transistor
Inorganic chemistry
Silicon oxide
Plasma etching
1
Papers
6
Citations
0.00
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (1)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
High Precision Etching of Si / SiO2 on a High-Density Helicon Etcher for Nanoscale Devices
2003
Journal of The Electrochemical Society
L. Dreeskornfeld
J. Hartwich
Johannes Kretz
D. Schmitt-Landsiedel
D. Loraine
K Powell
D J Thomas
Show All
Source
Cite
Save
Citations (6)
1