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H Okada

National Institute of Advanced Industrial Science and Technology

5

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A digital output accelerometer using MEMS-based piezoelectric accelerometers and arrayed CMOS inverters with satellite capacitors

2011 Smart Materials and Structures
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A digital output piezoelectric accelerometer using a Pb(Zr, Ti)O3 thin film array electrically connected in series

2010 Smart Materials and Structures
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A Digital Output Piezoelectric Accelerometer using Pattenrned Pb(Zr, Ti)O 3 Thin Films Electrically Connected in Series

2009 MEMS | International Conference on Micro Electro Mechanical Systems
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A digital output piezoelectric accelerometer using CMOS-compatible AlN thin film

2009 International Conference on Solid-State Sensors, Actuators and Microsystems
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A DIGITALOUTPUT PIEZOELECTRICACCELEROMETER USINGPATTENRNED PB(ZR,TI)03 THINFILMS ELECTRICALLYCONNECTED INSERIES

2009 International Conference on Micro Electro Mechanical Systems
- T. Kobayashi
- H Okada
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