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M.J. Brown
M.J. Brown
University of Glasgow
Inelastic scattering
Collimated light
Optics
Dry etching
Isotropic etching
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Quantum electron beam probe of sidewall dry-etch damage
2000
Microelectronic Engineering
M. Rahman
J. G. Williamson
Keith Mathieson
G. Dick
M.J. Brown
S Duffy
C. D. W. Wilkinson
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