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Doug Hahn
Doug Hahn
FEI Company
Metallurgy
Materials science
Process engineering
Aspect ratio (aeronautics)
Process control
2
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2
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DB FIB For In‐Line Process Control
2005
Characterization and Metrology for ULSI Technology
Harald Dr. Bloeß
Ulrich Mantz
Craig Henry
Ralf Lehmann
Doug Hahn
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