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tanaka akiho
tanaka akiho
Chemical-mechanical planarization
Materials science
Microelectromechanical systems
Composite material
material removal
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307 MEMS技術を応用したCMP用マイクロパターンパッドの研究 : 異なる形状パターンによる研磨レートの比較(GS 生産加工I)
2010
yasuda keisuke
kimura keiiti
katyoonrunruan panaato
tanaka akiho
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