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A. F. Potafeev
A. F. Potafeev
Sputter deposition
Thin film
Indentation hardness
Titanium diboride
Chemistry
2
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5
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Effect of deposition conditions and substrate material on the microhardness of titanium diboride films prepared by magnetron sputtering
1995
Inorganic Materials
R. A. Andrievskii
G. V. Kalinnikov
A. F. Potafeev
M. A. Ponomarev
S. Yu. Sharivker
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Citations (5)
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