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Masaya Mochizuki

Osaka University

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Over 1.5 µm Deep Dry Etching of Al-Rich AlGaAs for Photonic Crystal Fabrication

2013 Japanese Journal of Applied Physics
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Over 1.5 μm Deep Dry Etching of Al-rich AlGaAs for Photonic Crystal Fabrication

2012 The Japan Society of Applied Physics
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Dry Etching of Al-Rich AlGaAs for Photonic Crystal Fabrication

2011 Japanese Journal of Applied Physics
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Introduction of GaInNAs Gain Medium into Circularly Arranged Photonic Crystal Cavity

2011 Japanese Journal of Applied Physics
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