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Hisanori Oki
Hisanori Oki
Materials science
Plasma-enhanced chemical vapor deposition
Abrasion (geology)
ALCAP
Doping
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Irregular growth of PECVD-Ti silicide film on doped Si substrates
2000
IITC | International Interconnect Technology Conference
Kaori Tai
Yusuke Harada
Muneyuki Matsumoto
Hisanori Oki
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