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Ho Seok Lee
Ho Seok Lee
Sungkyunkwan University
Etching
Optoelectronics
Global warming
Global-warming potential
Amorphous carbon
3
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1
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0
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SiO2 etch characteristics and environmental impact of Ar/C3F6O chemistry
2018
Journal of Vacuum Science and Technology
Ho Seok Lee
Kyung Chae Yang
Soo Gang Kim
Ye Ji Shin
Dae Woong Suh
Han Dock Song
Nae-Eung Lee
Geun Young Yeom
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Nanoscale Spin-Transfer Torque MRAM Etching Using Various Gases
2017
Kyung Chae Yang
Sung Woo Park
Ho Seok Lee
Geun Young Yeom
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Effect of embedded pulse plasma on the etch of SiO₂ by varying the duty percentage
2016
Ho Seok Lee
Kyung Chae Yang
Sung Woo Park
Jin Woo Park
Geun Young Yeom
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