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Kengo Haraguchi
Kengo Haraguchi
Pressure gradient
Materials science
Thin film
Aluminium nitride
Composite material
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Growth of AlN thin films by pressure gradient sputtering
2021
The Japan Society of Applied Physics
Kengo Haraguchi
Ryo Ichinose
Hiroki Ohta
Ken Yonezawa
Yoshikazu Terai
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