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Tetsuya Yukimoto
Tetsuya Yukimoto
Thermal
Plasma
Oxide
Analytical chemistry
Substrate (chemistry)
3
Papers
15
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Three-Dimensional Two-Temperature Modeling of Ar Loop-Type Inductively Coupled Thermal Plasma for Surface Modification
2020
Plasma Chemistry and Plasma Processing
Genki Ozeki
Yasunori Tanaka
Y Sugiyama
Yusuke Nakano
Tatsuo Ishijima
Yoshihiko Uesugi
Tetsuya Yukimoto
Hiroshi Kawaura
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Rapid Surface Oxidation of the Si Substrate Using Longitudinally Long Ar/O 2 Loop Type of Inductively Coupled Thermal Plasmas
2016
IEEE Transactions on Plasma Science
Yuji Maruyama
Yasunori Tanaka
Hiromitsu Irie
Takumi Tsuchiya
Mai Kai Suan Tial
Yoshihiko Uesugi
Tatsuo Ishijima
Tetsuya Yukimoto
Hiroshi Kawaura
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Citations (8)
1