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M. Bender
M. Bender
RWTH Aachen University
Nanolithography
Optics
Nanoimprint lithography
Photolithography
Reproducibility
1
Papers
16
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Reproducibility and homogeneity in step and repeat UV-nanoimprint lithography
2004
Microelectronic Engineering
M. Otto
M. Bender
F. Richter
B. Hadam
T. Kliem
R. Jede
B. Spangenberg
H. Kurz
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Citations (16)
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