Old Web
English
Sign In
Acemap
>
authorDetail
>
Shoji Kobayashi
Shoji Kobayashi
Analytical chemistry
Plasma
Reactive-ion etching
Etching
Plasma etching
2
Papers
16
Citations
0.00
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (2)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
Modeling and Simulation of Plasma-Induced Damage Distribution during Hole Etching of SiO2 over Si Substrate by Fluorocarbon Plasma
2012
Applied Physics Express
Nobuyuki Kuboi
Tetsuya Tatsumi
Shoji Kobayashi
Takashi Kinoshita
Jun Komachi
Masanaga Fukasawa
Hisahiro Ansai
Show All
Source
Cite
Save
Citations (8)
Numerical Simulation Method for Plasma-Induced Damage Profile in SiO2 Etching
2011
Japanese Journal of Applied Physics
Nobuyuki Kuboi
Tetsuya Tatsumi
Shoji Kobayashi
Jun Komachi
Masanaga Fukasawa
Takashi Kinoshita
Hisahiro Ansai
Show All
Source
Cite
Save
Citations (8)
1