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J.P.G. de Mussy
J.P.G. de Mussy
Katholieke Universiteit Leuven
Materials science
Resist
Copper interconnect
Leakage (electronics)
Electronic engineering
2
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4
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The critical role of the metal / porous low-k interface in post direct CMP defectivity generation and resulting ULK surface and bulk hydrophilisation
2007
IITC | International Interconnect Technology Conference
Youssef Travaly
Fabrice Sinapi
Nancy Heylen
A. Humbert
M. Delande
R. Caluwaert
J.P.G. de Mussy
G. Vereecke
M. R. Baklanov
Francesca Iacopi
J.L. Hernandèz
Gerald Beyer
Paul B. Fischer
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Novel selective sidewall airgap process [single damascene interconnects]
2005
IITC | International Interconnect Technology Conference
J.P.G. de Mussy
C. Bruynsereade
Z. Tokeil
Gerald Beyer
Karen Maex
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