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Atsusi Saito
Atsusi Saito
Amorphous solid
Chemical vapor deposition
Dielectric
Nitrogen
Partial charge
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11
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Effects of Nitrogen Addition to Fluorinated Silicon Dioxide Films
1998
Japanese Journal of Applied Physics
Seiichi Hasegawa
Atsusi Saito
J. Lubguban
Takao Inokuma
Y. Kurata
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