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Xiaofei He
Xiaofei He
Tsinghua University
Scale factor
Bulk micromachining
Accelerometer
Silicon
Stamping
1
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7
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Temperature-drift characterization of a micromachined resonant accelerometer with a low-noise frequency readout
2019
Sensors and Actuators A-physical
Zhengxiang Fang
Yonggang Yin
Xiaofei He
Fengtian Han
Yunfeng Liu
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Citations (7)
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