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Patrick Debergh
Patrick Debergh
Swiss Center for Electronics and Microtechnology
Electronic engineering
Materials science
Microelectromechanical systems
Stiction
Electrode
4
Papers
15
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Arrays of addressable contactless optical microshutters
2005
Microsystem Technologies-micro-and Nanosystems-information Storage and Processing Systems
Stephan Gonseth
Gregoire Perregaux
Roberto Frosio
Jean-Philippe Thiébaud
Henri Vuillomenet
Patrick Debergh
Carsten Underbjerg
Tue Ravnkilde
Henning Henningsen
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Arrays of addressable high-speed optical microshutters
2001
MEMS | International Conference on Micro Electro Mechanical Systems
Gregoire Perregaux
Stephan Gonseth
Patrick Debergh
J.-P. Thiebaud
H. Vuilliomenet
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Switching device, especially for optical switching
2001
Claude Bourgeois
Patrick Debergh
Stephan Gonseth
Gregoire Perregaux
Felix Rudolf
Der Wiel Appolonius Van
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Anodic oxidation in polysilicon microactuators
2000
DTIP | Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS
Pierre Voumard
Patrick Debergh
Gregoire Perregaux
Stephan Gonseth
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Citations (2)
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