Old Web
English
Sign In
Acemap
>
authorDetail
>
Yasuhiro Okui
Yasuhiro Okui
1
Papers
0
Citations
0
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (1)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
Dry cleaning of Si and SiO2 surfaces using SiCl4 system
1995
International Symposium on Semiconductor Manufacturing
Rinshi Sugino
Yasuhiro Okui
Maiko Shigeno
Susumu Okubo
Kanehisa Takasaki
Toshihiro Ito
Show All
Source
Cite
Save
Citations (0)
1