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D Dries Vanhemel
D Dries Vanhemel
Eindhoven University of Technology
Chemistry
Atomic layer deposition
Inorganic chemistry
Analytical chemistry
Crystallization
3
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Atomic layer deposition of ln2O3: H from lnCp and H2O/O2
2017
Y. Wu
Bart Macco
D Dries Vanhemel
Sebastian Kölling
Verheijen
Pm Paul Koenraad
W.M.M. Kessels
F. Roozeboom
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