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Joseph C. Revelli

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Tungsten Nitrido Complexes as Precursors for Low Temperature Chemical Vapor Deposition of WNxCy Films as Diffusion Barriers for Cu Metallization

2014 Journal of the American Chemical Society
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Development of group III/nitride core/shell heterostructures by atomic layer deposition on nanorods

2013
- Joseph C. Revelli
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