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K. Menguelti
K. Menguelti
Spectroscopy
Nanolithography
Raman spectroscopy
Ultraviolet
Photoresist
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Mechanisms involved in HBr and Ar cure plasma treatments applied to 193 nm photoresists
2009
Journal of Applied Physics
Erwine Pargon
K. Menguelti
Mickaël Martin
Arnaud Bazin
O. Chaix-Pluchery
Claire Sourd
S. Derrough
Thorsten Lill
O. Joubert
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Citations (66)
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