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Toshiro Nakai
Toshiro Nakai
Saga Group
Getter
Wafer
Limiting oxygen concentration
Analytical chemistry
Physics
4
Papers
12
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Effect of low-oxygen-concentration layer on iron gettering capability of carbon-cluster ion-implanted Si wafer for CMOS image sensors
2018
Japanese Journal of Applied Physics
Ayumi Onaka-Masada
Toshiro Nakai
Ryosuke Okuyama
Hidehiko Okuda
Takeshi Kadono
Ryo Hirose
Yoshihiro Koga
Kazunari Kurita
Koji Sueoka
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Gettering mechanism in hydrocarbon-molecular-ion-implanted epitaxial silicon wafers revealed by three-dimensional atom imaging
2018
Japanese Journal of Applied Physics
Ayumi Onaka-Masada
Ryosuke Okuyama
Toshiro Nakai
Satoshi Shigematsu
Hidehiko Okuda
Koji Kobayashi
Ryo Hirose
Takeshi Kadono
Yoshihiro Koga
Masanori Shinohara
Koji Sueoka
Kazunari Kurita
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Citations (6)
Characteristics of Carbon Cluster Ion Implanted Epitaxial Silicon Wafers(1) -The influence of oxygen concentration in implanted region on gettering of metallic impurities-
2016
The Japan Society of Applied Physics
Ayumi Masada
Toshiro Nakai
Ryo Hirose
Takeshi Kadono
Ryosuke Okuyama
Yoshihiro Koga
Hidehiko Okuda
Kazunari Kurita
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Attempts of radiation safety education in the southern Fukushima-Hamadoori district part3 - joint NCT-JAEA radiation safety/decomissioning classes and meetings at the campus
2014
Shigekazu Suzuki
Seichi Sato
Hiroshi Kinoshita
Shinji Sato
Shiro Jitsukawa
Katsuhiro Aoyagi
Koichi Nara
Atsushi Katayama
Toshiro Nakai
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