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M. Kojima
M. Kojima
University of Hyogo
Oxygen
Dry etching
Reactive-ion etching
Etching
Halogen
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Cu pattern etching by oxygen gas cluster ion beams with acetic acid vapor
2014
IITC | International Interconnect Technology Conference
N. Toyoda
M. Kojima
R. Hinoura
Akira Yamaguchi
Ken-ichi Hara
Isao Yamada
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