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Emi Watanabe

4

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Polysilane-based 3D waveguides for optical interconnects

2008
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Precise patterning of SiO2-based glass by low-temperature nanoimprint lithography assisted by UV irradiation on both faces using Glasia® as a precursor

2007 Journal of Vacuum Science & Technology B
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Fabrication and optical properties of the multilayered waveguide made by photobleaching process

2006
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Novel manufacturing process of waveguide using selective photobleaching of polysilane films by UV light irradiation

2003
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