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Andreas Wurmbrand
Andreas Wurmbrand
Lithography
Electronic engineering
Materials science
Optoelectronics
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Projection objective of a microlithographic projection exposure system
2011
Moritz Becker
Dirk Heinrich Ehm
Vladimir Kamenov
Ulrich Löring
Stefan-Wolfgang Schmidt
Andreas Wurmbrand
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Objectif pour lithographie par immersion
2006
Bernhard Gellrich
Paul Graeupner
Juergen Fischer
Andreas Wurmbrand
Bauke Jansen
Bob Streefkerk
Christiaan Alexander Hoogendam
Johannes Jacobus Matheus Baselmans
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Lithography objective having exchanging apparatus for an optical element and manufacturing method by means of this lithography objective
2004
Jens Kugler
Franz Sorg
Andreas Wurmbrand
Thomas Ittner
Thomas Schletterer
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Dispositif de support d'element optique dans un objectif
2004
Bernhard Gellrich
Andreas Wurmbrand
Jens Kugler
Armin Schoeppach
Christian Zengerling
Stephane Bruynooghe
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