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Larry Herko
Larry Herko
Xerox
Electronic engineering
Optical switch
Waveguide (optics)
Optical add-drop multiplexer
Silicon on insulator
3
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9
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Multi-user hybrid process platform for MEMS devices using silicon-on-insulator wafers
2005
MEMS | International Conference on Micro Electro Mechanical Systems
Pinyen Lin
R. M. Boysel
M. Boysel
M. Winters
W. Hawkins
Joel A. Kubby
Peter M. Gulvin
James C. Diehl
Kathleen A. Feinberg
Kristine A. German
Larry Herko
Nancy Y. Jia
Jun Ma
John Meyers
Peter J. Nystrom
Yao Rong Wang
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Citations (2)
Optical add and drop multiplexer using on-chip integration of planar light circuits and optical microelectromechanical system switching
2004
Journal of Vacuum Science and Technology
Xueyuan Liu
Joel A. Kubby
Jingkuang Chen
James C. Diehl
Kathleen A. Feinberg
Kristine A. German
Peter M. Gulvin
Larry Herko
Nancy Y. Jia
Pinyen Lin
Jun Ma
John Meyers
Peter J. Nystrom
Yao Rong Wang
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Citations (5)
Optical MEMS platform for low-cost on-chip integration of planar light circuits and optical switching
2004
Kristine A. German
Joel A. Kubby
Jingkuang Chen
James C. Diehl
Kathleen A. Feinberg
Peter M. Gulvin
Larry Herko
Nancy Y. Jia
Pinyen Lin
Xueyuan Liu
Jun Ma
John Meyers
Peter J. Nystrom
Yao Rong Wang
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Citations (2)
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