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Sandra Doerrenbaecher
Sandra Doerrenbaecher
AZ Electronic Materials
Polymer
Coating
Spin-½
Polymer solution
Nanotechnology
1
Papers
5
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Development of spin-on-carbon hard mask for advanced node
2014
Proceedings of SPIE
Takanori Kudo
M. Dalil Rahman
Douglas Mckenzie
Clement Anyadiegwu
Sandra Doerrenbaecher
Wolfgang Zahn
Munirathna Padmanaban
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