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O. Shinbo
O. Shinbo
Proximity effect (audio)
Optics
Analytical chemistry
Electron-beam lithography
Beam (structure)
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EPL proximity and Coulomb effect correction by mask bias method
2001
MNC | International Microprocesses and Nanotechnology Conference
Hideo Kobinata
Yasuhisa Yamada
Takao Tamura
K. Fujii
O. Shinbo
H Nozue
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