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Brian Fraser
Brian Fraser
Metallurgy
Chemical engineering
Corrosion
Particle
Electronic engineering
2
Papers
8
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A Theoretical and Experimental Study of Damage-Free BEOL Cleaning with Megasonic Agitation
2003
Solid State Phenomena
Jeffrey M. Lauerhaas
Yi Wu
Mario Bran
Brian Fraser
Eric Brause
Tom Nicolosi
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Single wafer cleaning and drying: particle removal via a non-contact, non-damaging megasonic clean followed by a high performance "Rotagoni" dry
2000
ISSM | International Symposium on Semiconductor Manufacturing
Jeff Lauerhaas
Paul W. Mertens
Wim Fyen
Karine Kenis
Marc Meuris
Tom Nicolosi
Mario Bran
Brian Fraser
Cole S. Franklin
Yi Wu
Marc Heyns
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Citations (7)
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