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Yoshihiro Hirai
Yoshihiro Hirai
Tokyo Polytechnic University
Sputter deposition
Analytical chemistry
Titanium
High-power impulse magnetron sputtering
Plasma
3
Papers
4
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0
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Dependence of Optical Emission Spectra on Argon Gas Pressure during Modulated Pulsed Power Magnetron Sputtering (MPPMS)
2021
ICOPS | International Conference on Plasma Science
Masaomi Sanekata
Hiroshi Nishida
Yuki Nakagomi
Yoshihiro Hirai
Nobuo Nishimiya
Masahide Tona
Naoyuki Hirata
Hiroaki Yamamoto
Keizo Tsukamoto
Keijiro Ohshimo
Fuminori Misaizu
Kiyokazu Fuke
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Delayed Discharge Bridging Two Sputtering Modes from Modulated Pulsed Power Magnetron Sputtering (MPPMS) to Deep Oscillation Magnetron Sputtering (DOMS)
2021
ICOPS | International Conference on Plasma Science
Masaomi Sanekata
Hiroshi Nishida
Tatsuya Watabe
Yuki Nakagomi
Yoshihiro Hirai
Nobuo Nishimiya
Masahide Tona
Hiroaki Yamamoto
Naoyuki Hirata
Keizo Tsukamoto
Keijiro Ohshimo
Fuminori Misaizu
Kiyokazu Fuke
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Time-of-flight mass spectrometric diagnostics for ionized and neutral species in high power pulsed magnetron sputtering of titanium
2020
Japanese Journal of Applied Physics
Keizo Tsukamoto
Tetsuro Tamura
Hiromi Matsusaki
Masahide Tona
Hiroaki Yamamoto
Yuki Nakagomi
Hiroshi Nishida
Yoshihiro Hirai
Nobuo Nishimiya
Masaomi Sanekata
Keijiro Ohshimo
Kiichirou Koyasu
Fuminori Misaizu
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Citations (3)
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