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Sung-Soo Woo
Sung-Soo Woo
SK Hynix
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Flare
Root cause
Optics
Nuclear magnetic resonance
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Intrafield CD variation by stray light from neighboring field
2002
Chang-Moon Lim
Jung-Ho Song
Sung-Soo Woo
Ki-Sung Kwon
Chang-Nam Ahn
Ki Soo Shin
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