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Hsueh-Chung Chen
Hsueh-Chung Chen
Materials science
Copper
Chemical-mechanical planarization
Corrosion
Metallurgy
2
Papers
5
Citations
0
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2024
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A novel CMP application on the fabrication of dual-damascene structures for advanced copper/low-k interconnections
2002
IITC | International Interconnect Technology Conference
Shao-Chung Hu
Hsueh-Chung Chen
Liang Yuan Fang
Chien-Mei Wang
Cheng-Yu Hung
Wen-Yi Hsieh
Po-Wen Yen
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Defect reduction of copper BEOL for advanced ULSI interconnect
2001
IITC | International Interconnect Technology Conference
Hsueh-Chung Chen
Teng-Chun Tsai
Yimin Huang
Chao Hui Huang
Chien-Hung Chen
Yung-Tsung Wei
Ming-Sheng Yang
J.Y. Wu
Tri Rung Yew
Jen-Kon Chen
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Citations (5)
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