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Vidya Kaushik
Vidya Kaushik
State University of New York System
Contamination
Bevel
Epitaxy
Wafer
Metallurgy
3
Papers
2
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0
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Backside and Edge Cleaning of III-V on Si Wafers for Contamination Free Manufacturing CFM: Contamination Free Manufacturing
2015
Alexey Vert
Tommaso Orzali
Tom Dyer
Richard Hill
PapaRao Satyavolu
Edward Barth
Richard H. Gaylord
Shan Hu
Saikumar Vivekanand
Joshua Herman
Uzma Rana
Vidya Kaushik
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Backside and edge cleaning of III–V on Si wafers for contamination free manufacturing
2015
ASMC | Advanced Semiconductor Manufacturing Conference
Alexey Vert
Tommaso Orzali
Tom Dyer
Richard Hill
PapaRao Satyavolu
Edward Barth
Richard Gaylord
Shan Hu
Saikumar Vivekanand
Joshua Herman
Uzma Rana
Vidya Kaushik
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