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Ilsang Choi
Ilsang Choi
SK Hynix
Physics
Microstructure
Chemical engineering
Metalorganic vapour phase epitaxy
Crystallography
5
Papers
10
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Influence of gas ratio on the microstructure of RuOx films prepared by using liquid delivery MOCVD
2002
Journal of the Korean Physical Society
K. S. Kim
Nam-Soo Kim
Jung-Bum Choi
Ilsang Choi
Ho Joung Kim
Ju Chul Park
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Formation mechanism of the multilayered-structure barrier of WNx/Si(100)
2002
Applied Physics Letters
Ilsang Choi
Ju Chul Park
Joungcheul Choi
Hong Ik Kim
Sung Kwon Lee
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Fabrication and Characterization of Ru Thin Films Prepared by Liquid Delivery Metal-Organic Chemical Vapor Deposition
2002
Japanese Journal of Applied Physics
Kyoung-Won Kim
Nam-Soo Kim
Yeong Seuk Kim
Ilsang Choi
Ho Joung Kim
Ju Chul Park
Soun-Young Lee
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Characterization on microstructures of tungsten/barrier metals (TiN,WNx)/silicon multilayer films
2002
Journal of Applied Physics
Jun-Mo Yang
Ilsang Choi
Yong Soo Kim
Ju Chul Park
Sang-Moo Lee
Tae-Eun Hong
Yoon-Beak Park
Soun-Young Lee
Yil Wook Kim
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Study on the multi-layer structure and the formation mechanism of the interface layer between WN_x/Si(100)
2001
Ilsang Choi
Jintae Choi
Ho Joung Kim
Soun-Young Lee
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