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Thuc H. Dam
Thuc H. Dam
Intel
Engineering
Resist
Automotive engineering
Engineering drawing
Photolithography
3
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6
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The design and qualification of the TEL CLEAN TRACK ACT M photomask coating tool at Intel
2006
Andrew Jamieson
Thuc H. Dam
Ki-Ho Baik
Ken Duerksen
Elie Eidson
Keiji Akai
Kazuya Hisano
Norifumi Kohama
Shinichi Machidori
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Citations (2)
PAB and PEB temperature gradient methodology for CAR optimization
2006
Thuc H. Dam
Andrew Jamieson
Maiying Lu
Ki-Ho Baik
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Citations (4)
SMIF capability at Intel Mask Operation improves yield
2003
Thuc H. Dam
Matt Pekny
Jim Millino
Gibson Luu
Nitesh Melwani
Aparna Venkatramani
Malahat Tavassoli
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